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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2015, Volume 41, Issue 5, Pages 9–17 (Mi pjtf7644)  
This article is cited in 9 scientific papers (total in 9 papers)

MOVPE of III–N LED structures with short technological process

V. V. Lundinab, D. V. Davydovab, E. E. Zavarinab, M. G. Popovb, A. V. Sakharovab, E. V. Yakovlevc, D. S. Bazarevskiic, R. A. Talalaevc, A. F. Tsatsul'nikovab, M. N. Mizerovb, V. M. Ustinova

a Ioffe Institute, St. Petersburg
b Submicron Heterostructures for Microelectronics Research and Engineering Center, Russian Academy of Sciences, St. Petersburg
c Soft-Impact Ltd., Saint-Petersburg
Full-text PDF (400 kB) Citations (9)
Abstract: The paper presents results on optimizing the MOVPE technology of light-emitting diode (LED) structures in a Dragon-125 system to accelerate the technological cycle. Due to the high growth rate of GaN layers and optimization of the initial GaN growth phase, the total duration of the epitaxial process is reduced from 4 h 45 min to 2 h 44 min. The LED diode structures grown by this technique compare well in quality with LEDs grown by the standard method in the commercially available AIX2000HT system.
Received: 12.09.2014
English version:
Technical Physics Letters, 2015, Volume 41, Issue 3, Pages 213–216
DOI: https://doi.org/10.1134/S1063785015030116
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. V. Lundin, D. V. Davydov, E. E. Zavarin, M. G. Popov, A. V. Sakharov, E. V. Yakovlev, D. S. Bazarevskii, R. A. Talalaev, A. F. Tsatsul'nikov, M. N. Mizerov, V. M. Ustinov, “MOVPE of III–N LED structures with short technological process”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 41:5 (2015), 9–17; Tech. Phys. Lett., 41:3 (2015), 213–216
Citation in format AMSBIB
\Bibitem{LunDavZav15}
\by V.~V.~Lundin, D.~V.~Davydov, E.~E.~Zavarin, M.~G.~Popov, A.~V.~Sakharov, E.~V.~Yakovlev, D.~S.~Bazarevskii, R.~A.~Talalaev, A.~F.~Tsatsul'nikov, M.~N.~Mizerov, V.~M.~Ustinov
\paper MOVPE of III--N LED structures with short technological process
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2015
\vol 41
\issue 5
\pages 9--17
\mathnet{http://mi.mathnet.ru/pjtf7644}
\elib{https://elibrary.ru/item.asp?id=24196342}
\transl
\jour Tech. Phys. Lett.
\yr 2015
\vol 41
\issue 3
\pages 213--216
\crossref{https://doi.org/10.1134/S1063785015030116}
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    • This publication is cited in the following 9 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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