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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2015, Volume 41, Issue 10, Pages 29–34 (Mi pjtf7719)  

This article is cited in 1 scientific paper (total in 1 paper)

The effect of surfactants on epitaxial growth of gallium nitride from gas phase in the Ga–HCl–NH$_3$–H$_2$–Ar system

Yu. V. Zhilyaev, V. V. Zelenin, T. A. Orlova, V. N. Panteleev, N. K. Poletaev, S. N. Rodin, S. A. Snytkina

Ioffe Institute, St. Petersburg
Full-text PDF (703 kB) Citations (1)
Abstract: We have studied epitaxial layers of gallium nitride (GaN) in a template composition grown by surfactant-mediated hydride-chloride vapor phase epitaxy. The surfactant component was provided by 5 mass% additives of antimony and indium to the source of gallium. Comparative analysis of the obtained results shows evidence of the positive influence of surfactants on the morphology of epitaxial GaN layers.
Received: 17.07.2014
English version:
Technical Physics Letters, 2015, Volume 41, Issue 10, Pages 476–478
DOI: https://doi.org/10.1134/S1063785015050314
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: Yu. V. Zhilyaev, V. V. Zelenin, T. A. Orlova, V. N. Panteleev, N. K. Poletaev, S. N. Rodin, S. A. Snytkina, “The effect of surfactants on epitaxial growth of gallium nitride from gas phase in the Ga–HCl–NH$_3$–H$_2$–Ar system”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 41:10 (2015), 29–34; Tech. Phys. Lett., 41:10 (2015), 476–478
Citation in format AMSBIB
\Bibitem{ZhiZelOrl15}
\by Yu.~V.~Zhilyaev, V.~V.~Zelenin, T.~A.~Orlova, V.~N.~Panteleev, N.~K.~Poletaev, S.~N.~Rodin, S.~A.~Snytkina
\paper The effect of surfactants on epitaxial growth of gallium nitride from gas phase in the Ga--HCl--NH$_3$--H$_2$--Ar system
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2015
\vol 41
\issue 10
\pages 29--34
\mathnet{http://mi.mathnet.ru/pjtf7719}
\elib{https://elibrary.ru/item.asp?id=24196417}
\transl
\jour Tech. Phys. Lett.
\yr 2015
\vol 41
\issue 10
\pages 476--478
\crossref{https://doi.org/10.1134/S1063785015050314}
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  • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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