Fabrication and diagnostics of planar cellular carbon structures

New planar carbon structure with carbon atoms in both $sp^2$ and $sp^3$ states has been fabricated with the use of strongly ionized low-pressure nonequilibrium microwave plasma. It was demonstrated by using near-field microwave and atomic-force microscopy that the carbon structure is a macroscopic formation with a honeycomb structure, hexagonal macrocell size of 7.5–9.0 $\mu$m, and wall thickness at base of 3.0–4.0 $\mu$m. It was found that the presence of breaks in walls of the hexagonal macrocells is a distinctive feature of a structure of this kind.