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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2015, Volume 41, Issue 14, Pages 56–63 (Mi pjtf7779)  
This article is cited in 5 scientific papers (total in 5 papers)

Properties of contact coatings based on ruthenium nanofilms for MEMS switches

S. M. Karabanov, N. A. Verlov, D. V. Suvorov, G. P. Gololobov, E. V. Slivkin

Ryazan State Radio Engineering University
Full-text PDF (374 kB) Citations (5)
Abstract: Switching properties of contact coatings based on ruthenium nanofilms obtained by electrochemical deposition have been studied. The laws of variation of the contact resistance as a function of the number of switching cycles are established as dependent on the coating thickness and surface roughness. Optimum parameters of contact coatings are determined that ensure minimum contact resistance of switches for micro-electromechanical systems (MEMS) operating in steady-state regimes.
Received: 30.12.2015
English version:
Technical Physics Letters, 2015, Volume 41, Issue 7, Pages 691–693
DOI: https://doi.org/10.1134/S1063785015070226
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: S. M. Karabanov, N. A. Verlov, D. V. Suvorov, G. P. Gololobov, E. V. Slivkin, “Properties of contact coatings based on ruthenium nanofilms for MEMS switches”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 41:14 (2015), 56–63; Tech. Phys. Lett., 41:7 (2015), 691–693
Citation in format AMSBIB
\Bibitem{KarVerSuv15}
\by S.~M.~Karabanov, N.~A.~Verlov, D.~V.~Suvorov, G.~P.~Gololobov, E.~V.~Slivkin
\paper Properties of contact coatings based on ruthenium nanofilms for MEMS switches
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2015
\vol 41
\issue 14
\pages 56--63
\mathnet{http://mi.mathnet.ru/pjtf7779}
\elib{https://elibrary.ru/item.asp?id=24196480}
\transl
\jour Tech. Phys. Lett.
\yr 2015
\vol 41
\issue 7
\pages 691--693
\crossref{https://doi.org/10.1134/S1063785015070226}
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    • This publication is cited in the following 5 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
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