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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2014, Volume 40, Issue 7, Pages 35–41 (Mi pjtf8118)  

This article is cited in 4 scientific papers (total in 4 papers)

Formation of a diamond-like carbon film by magnetron sputtering of a graphite target under radiation flux from a black-body model

A. V. Kostanovskiiab, A. A. Pronkinab, I. A. Kostanovskiiab

a Joint Institute for High Temperatures, Russian Academy of Sciences, Moscow
b National Research University "Moscow Power Engineering Institute"
Full-text PDF (134 kB) Citations (4)
Abstract: A method of depositing a film (under a radiation flux from a high-temperature black-body model) by magnetron sputtering of a graphite target has been implemented. The elemental composition and structure of deposited films have been analyzed by X-ray photoelectron spectroscopy and characteristic electron-energy-loss spectroscopy. The investigations have shown that chemically pure diamond-like films can be formed at a radiation-flux density no less than 1.5 $\times$ 10$^{-4}$ W/m$^2$ in the spectral range of 170–255 nm.
Received: 08.11.2013
English version:
Technical Physics Letters, 2014, Volume 40, Issue 4, Pages 293–295
DOI: https://doi.org/10.1134/S1063785014040063
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. V. Kostanovskii, A. A. Pronkin, I. A. Kostanovskii, “Formation of a diamond-like carbon film by magnetron sputtering of a graphite target under radiation flux from a black-body model”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 40:7 (2014), 35–41; Tech. Phys. Lett., 40:4 (2014), 293–295
Citation in format AMSBIB
\Bibitem{KosProKos14}
\by A.~V.~Kostanovskii, A.~A.~Pronkin, I.~A.~Kostanovskii
\paper Formation of a diamond-like carbon film by magnetron sputtering of a graphite target under radiation flux from a black-body model
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2014
\vol 40
\issue 7
\pages 35--41
\mathnet{http://mi.mathnet.ru/pjtf8118}
\elib{https://elibrary.ru/item.asp?id=21311129}
\transl
\jour Tech. Phys. Lett.
\yr 2014
\vol 40
\issue 4
\pages 293--295
\crossref{https://doi.org/10.1134/S1063785014040063}
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  • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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