|
|
Pisma v Zhurnal Tekhnicheskoi Fiziki, 2014, Volume 40, Issue 7, Pages 35–41
(Mi pjtf8118)
|
|
|
|
This article is cited in 4 scientific papers (total in 4 papers)
Formation of a diamond-like carbon film by magnetron sputtering of a graphite target under radiation flux from a black-body model
A. V. Kostanovskiiab, A. A. Pronkinab, I. A. Kostanovskiiab a Joint Institute for High Temperatures, Russian Academy of Sciences, Moscow
b National Research University "Moscow Power Engineering Institute"
Abstract:
A method of depositing a film (under a radiation flux from a high-temperature black-body model) by magnetron sputtering of a graphite target has been implemented. The elemental composition and structure of deposited films have been analyzed by X-ray photoelectron spectroscopy and characteristic electron-energy-loss spectroscopy. The investigations have shown that chemically pure diamond-like films can be formed at a radiation-flux density no less than 1.5 $\times$ 10$^{-4}$ W/m$^2$ in the spectral range of 170–255 nm.
Received: 08.11.2013
Citation:
A. V. Kostanovskii, A. A. Pronkin, I. A. Kostanovskii, “Formation of a diamond-like carbon film by magnetron sputtering of a graphite target under radiation flux from a black-body model”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 40:7 (2014), 35–41; Tech. Phys. Lett., 40:4 (2014), 293–295
Linking options:
https://www.mathnet.ru/eng/pjtf8118 https://www.mathnet.ru/eng/pjtf/v40/i7/p35
|
|