Energy-dispersive X-ray-absorption edge spectrometry with spectrum filtration by X-ray mirrors

A highly sensitive energy-dispersive scheme with a semiconductor spectrometer is proposed for determining impurity concentrations from the X-ray-absorption edge spectra. The optimization of spectrum in a band studied is ensured by sequential reflections of transmitted radiation from X-ray mirrors and by variation of the grazing angle of the analyzed beam. Results of measurements of the X-ray-absorption edge spectra of Fe in dispersed salt samples and W impurity in beryllium plate are presented. It is shown that the problem of deconvolution can be numerically solved by smoothing X-ray-absorption fine-structure oscillations with power functions.