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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2014, Volume 40, Issue 18, Pages 90–96 (Mi pjtf8266)  
This article is cited in 1 scientific paper (total in 1 paper)

Properties of dust particles formed upon sputtering of a barium strontium titanate ceramic target in plasma of high-frequency discharge in oxygen

S. Kh. Alikhadzhieva, N. V. Lyanguzovb, P. S. Plyakac, G. N. Tolmachevc

a Chechen State University, Grozny
b Southern Federal University, Department of Physics, Rostov-on-Don
c Southern Research Center of the Russian Academy of Sciences, Rostov-on-Don
Full-text PDF (1004 kB) Citations (1)
Abstract: We have studied the behavior and properties of dust particles formed upon sputtering of a barium strontium titanate Ba(0.8)Sr(0.2)TiO$_3$ ceramic target in plasma of capacitive high-frequency discharge in oxygen. The particles were accumulated in potential traps situated near the target at a remote position of the substrate. Dependences of the density of accumulated dust on the pressure, discharge power, substrate position, and substrate voltage were determined using laser-radiation scattering. The dimensions and composition of collected dust particles were determined.
Received: 05.05.2014
English version:
Technical Physics Letters, 2014, Volume 40, Issue 9, Pages 819–821
DOI: https://doi.org/10.1134/S1063785014090168
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: S. Kh. Alikhadzhiev, N. V. Lyanguzov, P. S. Plyaka, G. N. Tolmachev, “Properties of dust particles formed upon sputtering of a barium strontium titanate ceramic target in plasma of high-frequency discharge in oxygen”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 40:18 (2014), 90–96; Tech. Phys. Lett., 40:9 (2014), 819–821
Citation in format AMSBIB
\Bibitem{AliLyaPly14}
\by S.~Kh.~Alikhadzhiev, N.~V.~Lyanguzov, P.~S.~Plyaka, G.~N.~Tolmachev
\paper Properties of dust particles formed upon sputtering of a barium strontium titanate ceramic target in plasma of high-frequency discharge in oxygen
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2014
\vol 40
\issue 18
\pages 90--96
\mathnet{http://mi.mathnet.ru/pjtf8266}
\elib{https://elibrary.ru/item.asp?id=22019662}
\transl
\jour Tech. Phys. Lett.
\yr 2014
\vol 40
\issue 9
\pages 819--821
\crossref{https://doi.org/10.1134/S1063785014090168}
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    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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