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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2014, Volume 40, Issue 21, Pages 46–53
(Mi pjtf8304)
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Absolute standard of diffusion length and lifetime of minority charge carriers in single-crystal silicon
V. A. Skidanov Institute for Design Problems in Microelectronics of Russian Academy of Sciences, Moscow
Abstract:
A substantial difference in electron recombination cross sections on Fe–B complexes $(\sigma_1)$ and on activated iron ions $(\sigma_2)$ in boron-doped single-crystal silicon is used to independently determine the lifetime of electrons in the standard $T_{st}$ using the surface photo-emf method. Pairs of values of the lifetime $T_1$ and $T_2$ before and after the decomposition of the Fe–B complexes were measured for each of 600 ingots at arbitrary diffusion length $L_{cal}$ for the calibrating specimen and were placed on the plane $(T_1, T_2)$. At the boundary of the region filled with the points, ingots are presented that are only contaminated with iron ions, so that $T_2/T_1= \sigma_1/\sigma_2$. The true values of $L_{st}$ and $T_{st}$ of the calibrating specimen and the ratio $\sigma_1/\sigma_2$ = 12.5 $\pm$ 0.5 are determined by selecting a new value of the diffusion length for the calibrating specimen, which straightens the boundary of the region filled with the points after the recalculation of the values of $T_1$ and $T_2$.
Received: 28.05.2014
Citation:
V. A. Skidanov, “Absolute standard of diffusion length and lifetime of minority charge carriers in single-crystal silicon”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 40:21 (2014), 46–53; Tech. Phys. Lett., 40:11 (2014), 957–960
Linking options:
https://www.mathnet.ru/eng/pjtf8304 https://www.mathnet.ru/eng/pjtf/v40/i21/p46
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