Precise calibration of thickness and composition of epitaxial AlGaAs heterostructures with vertical-cavity optical microresonators

We have studied the possibility of determining the actual thicknesses and compositions of separate layers in AlGaAs heterostructures with vertical-cavity optical microresonators by the combined use of optical reflectance spectroscopy and X-ray diffraction. It is established that a self-consistent solution of two inverse problems with the aid of a special test heterostructure partly removes the problem of solution ambiguity and increases the absolute accuracy of determination of the parameters of individual epitaxial layers.