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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2013, Volume 39, Issue 6, Pages 87–94 (Mi pjtf8458)  

This article is cited in 18 scientific papers (total in 18 papers)

On the mechanism of encapsulated particle formation during pulsed laser deposition of WSe$_x$ thin-film coatings

V. Yu. Fominskiyab, S. N. Grigor'evab, A. G. Gnedovetsab, R. I. Romanovab

a National Engineering Physics Institute "MEPhI", Moscow
b Moscow State Technological University "Stankin"
Abstract: We have studied factors influencing the formation of particles with the structure of a spherical metal W core inside a WSe$_2$ shell during pulsed laser deposition (PLD) of thin films of tungsten diselenide under variable conditions (buffer gas (Ar) pressure, substrate temperature). It is established that the metal core is formed at the stage of laser ablation of a synthesized WSe$_2$ target, while the shell grows as a result of condensation, migration, and redistribution of atoms during deposition of a laser-initiated atomic flow on the surface of a growing film. Retardation of the atomic flow by a buffer gas at pressures within 2–10 Pa does not ensure activation of the shell condensation process on the metal core in the gas phase. Increasing the substrate temperature from room temperature up to 250$^\circ$C leads to transformation of the shell structure from amorphous into laminar.
Received: 15.11.2012
English version:
Technical Physics Letters, 2013, Volume 39, Issue 3, Pages 312–315
DOI: https://doi.org/10.1134/S1063785013030206
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. Yu. Fominskiy, S. N. Grigor'ev, A. G. Gnedovets, R. I. Romanov, “On the mechanism of encapsulated particle formation during pulsed laser deposition of WSe$_x$ thin-film coatings”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 39:6 (2013), 87–94; Tech. Phys. Lett., 39:3 (2013), 312–315
Citation in format AMSBIB
\Bibitem{FomGriGne13}
\by V.~Yu.~Fominskiy, S.~N.~Grigor'ev, A.~G.~Gnedovets, R.~I.~Romanov
\paper On the mechanism of encapsulated particle formation during pulsed laser deposition of WSe$_x$ thin-film coatings
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2013
\vol 39
\issue 6
\pages 87--94
\mathnet{http://mi.mathnet.ru/pjtf8458}
\elib{https://elibrary.ru/item.asp?id=20328142}
\transl
\jour Tech. Phys. Lett.
\yr 2013
\vol 39
\issue 3
\pages 312--315
\crossref{https://doi.org/10.1134/S1063785013030206}
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  • This publication is cited in the following 18 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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