Effect of the vertical correlation of quantum dots on diffuse X-ray scattering

The effect of the vertical correlation of quantum dots (QDs) on diffuse X-ray scattering from multilayer structures has been studied in the framework of a statistical theory of X-ray diffraction. A model of the long-range structural order for the spatial distribution of vertically stacked QDs is considered. Diffuse X-ray scattering in superlattices with QDs has been numerically simulated. The obtained results are applied to a quantitative analysis of heterostructures with QDs using experimental data of high-resolution X-ray diffractometry.