Microresonator interference fiber-optic sensor of relative air humidity

A novel type of fiber-optic sensor of relative air humidity is developed on the basis of the micromechanical silicon microresonator and silica gel. The output signal of such a sensor in the frequency form has low sensitivity to variations in the laser-source power and to random attenuations in the fiber. In the case of purely optical excitation of oscillations of the resonator, the sensitive element of such a sensor is completely passive because it does not contain any electronic circuits and components. The sensor showed high sensitivity at a relative humidity less than 75%, possibility to operate at temperatures below freezing, and low dependence of readings on air temperature. The dependence of the humidity mass adsorbed by silica gel on the relative air humidity was found to be linear, which simplifies sensor calibration.