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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2012, Volume 38, Issue 1, Pages 45–50 (Mi pjtf8731)  
This article is cited in 5 scientific papers (total in 5 papers)

Laser-deposited thin hafnium dioxide condensates: Electron-microscopic study

A. G. Bagmut, I. A. Bagmut, V. A. Zhuchkov, M. O. Shevchenko

Khar'kov Polytechnical University
Full-text PDF (592 kB) Citations (5)
Abstract: Thin films of hafnium dioxide (HfO$_2$) have been obtained by pulsed laser ablation of hafnium targets in oxygen atmosphere and characterized by transmission electron microscopy and electron diffraction. Conditions ensuring the formation of an amorphous phase, tetragonal and monoclinic modifications of HfO$_2$ have been determined. It is established that the crystalline phase is formed on orienting substrates at lower temperatures than on neutral ones. The phenomenon of epitaxy has been observed for tetragonal modification of HfO$_2$. Annealing in air leads to crystallization of an initially amorphous film with the formation of a monoclinic HfO$_2$ modification.
Received: 22.06.2011
English version:
Technical Physics Letters, 2012, Volume 38, Issue 1, Pages 22–24
DOI: https://doi.org/10.1134/S1063785012010038
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. G. Bagmut, I. A. Bagmut, V. A. Zhuchkov, M. O. Shevchenko, “Laser-deposited thin hafnium dioxide condensates: Electron-microscopic study”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 38:1 (2012), 45–50; Tech. Phys. Lett., 38:1 (2012), 22–24
Citation in format AMSBIB
\Bibitem{BagBagZhu12}
\by A.~G.~Bagmut, I.~A.~Bagmut, V.~A.~Zhuchkov, M.~O.~Shevchenko
\paper Laser-deposited thin hafnium dioxide condensates: Electron-microscopic study
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2012
\vol 38
\issue 1
\pages 45--50
\mathnet{http://mi.mathnet.ru/pjtf8731}
\elib{https://elibrary.ru/item.asp?id=20327755}
\transl
\jour Tech. Phys. Lett.
\yr 2012
\vol 38
\issue 1
\pages 22--24
\crossref{https://doi.org/10.1134/S1063785012010038}
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    • This publication is cited in the following 5 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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