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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2012, Volume 38, Issue 5, Pages 49–55 (Mi pjtf8787)  
This article is cited in 4 scientific papers (total in 4 papers)

Mask for micropattern formation on diamond films

M. E. Belousovab, E. A. Il'ichevab, A. E. Kuleshovab, N. K. Matveevaab, P. V. Minakovab, G. N. Petrukhinab, R. M. Nabievab, G. S. Rychkovab

a State Research Institute of Physical Problems
b Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics
Full-text PDF (508 kB) Citations (4)
Abstract: A new technology of forming micropatterned masks for the etching of diamond films is proposed, which makes possible high-precision lithography on the samples with areas up to 10$^4$ mm$^2$. A minimum element size that can be achieved is only determined by the level of lithography accessible for silicon-based integrated circuits. The proposed technology can be used in creating unique devices, including biosensor chips for human genome decoding.
Received: 21.06.2011
English version:
Technical Physics Letters, 2012, Volume 38, Issue 3, Pages 225–227
DOI: https://doi.org/10.1134/S1063785012030054
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: M. E. Belousov, E. A. Il'ichev, A. E. Kuleshov, N. K. Matveeva, P. V. Minakov, G. N. Petrukhin, R. M. Nabiev, G. S. Rychkov, “Mask for micropattern formation on diamond films”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 38:5 (2012), 49–55; Tech. Phys. Lett., 38:3 (2012), 225–227
Citation in format AMSBIB
\Bibitem{BelIliKul12}
\by M.~E.~Belousov, E.~A.~Il'ichev, A.~E.~Kuleshov, N.~K.~Matveeva, P.~V.~Minakov, G.~N.~Petrukhin, R.~M.~Nabiev, G.~S.~Rychkov
\paper Mask for micropattern formation on diamond films
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2012
\vol 38
\issue 5
\pages 49--55
\mathnet{http://mi.mathnet.ru/pjtf8787}
\elib{https://elibrary.ru/item.asp?id=20327812}
\transl
\jour Tech. Phys. Lett.
\yr 2012
\vol 38
\issue 3
\pages 225--227
\crossref{https://doi.org/10.1134/S1063785012030054}
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    • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
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