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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2012, Volume 38, Issue 13, Pages 27–34 (Mi pjtf8894)  
This article is cited in 4 scientific papers (total in 4 papers)

Application of diamond-like carbon films to increase transmission of semi-insulating GaAs crystals in the IR spectral range

N. I. Klyuiabc, A. I. Liptugaabc, V. B. Lozinskiiabc, A. N. Lukyanovabc, A. P. Oksanychabc, V. A. Terbanabc

a Institute of Semiconductor Physics NAS, Kiev
b Kremenchug National University
c Silicon Ltd, Svetlovodsk, 27507, Ukraine
Full-text PDF (630 kB) Citations (4)
Abstract: The effect of treatments in plasmas of different gases and subsequent deposition of diamond-like carbon films (DCFs) on the transmission of semi-insulating GaAs crystals in the IR spectral range has been analyzed. It is shown that deposition of 1- to 1.5-$\mu$m DCFs makes it possible to increase the GaAs transmission in the range of 4–15 $\mu$m and that preliminary treatment in H$^+$ or Ar$^+$ plasma increases the optical transmission of the DCF-GaAs structure. A mechanism is proposed to explain the effect of plasma treatment on the optical transmission of semi-insulating GaAs in the IR spectral range.
Received: 07.03.2012
English version:
Technical Physics Letters, 2012, Volume 38, Issue 7, Pages 609–612
DOI: https://doi.org/10.1134/S106378501207005X
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: N. I. Klyui, A. I. Liptuga, V. B. Lozinskii, A. N. Lukyanov, A. P. Oksanych, V. A. Terban, “Application of diamond-like carbon films to increase transmission of semi-insulating GaAs crystals in the IR spectral range”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 38:13 (2012), 27–34; Tech. Phys. Lett., 38:7 (2012), 609–612
Citation in format AMSBIB
\Bibitem{KlyLipLoz12}
\by N.~I.~Klyui, A.~I.~Liptuga, V.~B.~Lozinskii, A.~N.~Lukyanov, A.~P.~Oksanych, V.~A.~Terban
\paper Application of diamond-like carbon films to increase transmission of semi-insulating GaAs crystals in the IR spectral range
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2012
\vol 38
\issue 13
\pages 27--34
\mathnet{http://mi.mathnet.ru/pjtf8894}
\elib{https://elibrary.ru/item.asp?id=20327919}
\transl
\jour Tech. Phys. Lett.
\yr 2012
\vol 38
\issue 7
\pages 609--612
\crossref{https://doi.org/10.1134/S106378501207005X}
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    • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
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