Specific features of ion-initiated processes during pulsed laser deposition of MoSe$_2$ coatings in pulsed electric fields

Experimental data and results of mathematical modeling have been used to determine the energy characteristics of an ion beam used to assist pulsed laser deposition (PLD) of MoSe$_2$ layers under conditions of positive high-voltage pulses applied to a laser-ablated target. It is shown that PLD assisted by implantation of ions at energies up to 100 keV can be used to obtain MoSe$_2$ coatings on $^{57}$Fe-containing substrates. Analysis of the concentration-depth profiles of Mo, Se, and $^{57}$Fe atoms and the phase composition of a near-surface layer in samples shows evidence for mass transfer domination in thermal spikes and a significant influence of ion impact on the structure of this layer at the nanoscale. These features are manifested by the formation of a nanocomposite structure with inclusions of a specific hexagonal FeSe phase. The obtained results demonstrate the existence of principally new possibilities of using the proposed modified PLD method for controlled formation of solid lubricant coatings with improved properties.