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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2012, Volume 38, Issue 16, Pages 1–8 (Mi pjtf8927)  
This article is cited in 4 scientific papers (total in 4 papers)

Studying the morphology of hemispherical-grain polycrystalline silicon films

A. V. Novakab, Yu. V. Nikol'skiiab, S. N. Fokichevab

a National Research University of Electronic Technology
b JSC "Angstrem", Moscow, Zelenograd
Full-text PDF (483 kB) Citations (4)
Abstract: The effect of the deposition temperature on the morphology of hemispherical-grain polycrystalline silicon (HSG-Si) films obtained by low-pressure chemical vapor deposition (LPCVD) has been studied using atomic force microscopy. The dependences of the relative surface area increment, density of grains, average height and lateral size of grains, mean square roughness, and correlation length on the deposition temperature have been determined in an interval used for the LPCVD growth of HSG-Si films.
Received: 26.03.2012
English version:
Technical Physics Letters, 2012, Volume 38, Issue 8, Pages 732–735
DOI: https://doi.org/10.1134/S1063785012080202
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. V. Novak, Yu. V. Nikol'skii, S. N. Fokichev, “Studying the morphology of hemispherical-grain polycrystalline silicon films”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 38:16 (2012), 1–8; Tech. Phys. Lett., 38:8 (2012), 732–735
Citation in format AMSBIB
\Bibitem{NovNikFok12}
\by A.~V.~Novak, Yu.~V.~Nikol'skii, S.~N.~Fokichev
\paper Studying the morphology of hemispherical-grain polycrystalline silicon films
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2012
\vol 38
\issue 16
\pages 1--8
\mathnet{http://mi.mathnet.ru/pjtf8927}
\elib{https://elibrary.ru/item.asp?id=20327952}
\transl
\jour Tech. Phys. Lett.
\yr 2012
\vol 38
\issue 8
\pages 732--735
\crossref{https://doi.org/10.1134/S1063785012080202}
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    • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
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