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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2012, Volume 38, Issue 19, Pages 83–89 (Mi pjtf8974)  
This article is cited in 14 scientific papers (total in 14 papers)

Fabrication of ultrafine silicon layers on sapphire

A. A. Shemukhinabcd, Yu. V. Balakshinabcd, V. S. Chernyshabcd, A. S. Patrakeevabcd, S. A. Golubkovabcd, N. N. Egorovabcd, A. I. Sidorovabcd, B. A. Malyukovabcd, V. N. Statsenkoabcd, V. D. Chumakabcd

a Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics
b Lomonosov Moscow State University
c Research Institute of Materials Science and Technology, Zelenograd
d EPIEL Company, Zelenograd, Moscow
Full-text PDF (330 kB) Citations (14)
Abstract: The effect of energy, dosage, and temperature of irradiation of silicon-on-sapphire structures by Si$^+$ ions, as well as parameters of recrystallization annealing, on crystallinity of silicon film is shown. Implantation conditions and recrystallization annealing conditions are determined.
Received: 08.06.2012
English version:
Technical Physics Letters, 2012, Volume 38, Issue 10, Pages 907–909
DOI: https://doi.org/10.1134/S1063785012100112
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. A. Shemukhin, Yu. V. Balakshin, V. S. Chernysh, A. S. Patrakeev, S. A. Golubkov, N. N. Egorov, A. I. Sidorov, B. A. Malyukov, V. N. Statsenko, V. D. Chumak, “Fabrication of ultrafine silicon layers on sapphire”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 38:19 (2012), 83–89; Tech. Phys. Lett., 38:10 (2012), 907–909
Citation in format AMSBIB
\Bibitem{SheBalChe12}
\by A.~A.~Shemukhin, Yu.~V.~Balakshin, V.~S.~Chernysh, A.~S.~Patrakeev, S.~A.~Golubkov, N.~N.~Egorov, A.~I.~Sidorov, B.~A.~Malyukov, V.~N.~Statsenko, V.~D.~Chumak
\paper Fabrication of ultrafine silicon layers on sapphire
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2012
\vol 38
\issue 19
\pages 83--89
\mathnet{http://mi.mathnet.ru/pjtf8974}
\elib{https://elibrary.ru/item.asp?id=20327999}
\transl
\jour Tech. Phys. Lett.
\yr 2012
\vol 38
\issue 10
\pages 907--909
\crossref{https://doi.org/10.1134/S1063785012100112}
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  • https://www.mathnet.ru/eng/pjtf/v38/i19/p83
    • This publication is cited in the following 14 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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