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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2012, Volume 38, Issue 20, Pages 1–7 (Mi pjtf8976)  
This article is cited in 9 scientific papers (total in 9 papers)

Calculating the extended defect contrast for the X-ray-beam-induced current method

Ya. L. Shabelnikovaab, E. B. Yakimovab, M. V. Grigor'evab, R. R. Fakhrtdinovab, V. A. Bushuevab

a Institute of Microelectronics Technology and High-Purity Materials RAS
b Lomonosov Moscow State University
Full-text PDF (739 kB) Citations (9)
Abstract: The contrast of extended defects representing dislocations and grain boundaries has been calculated for the X-ray-beam-induced current (XBIC) method. It is established that the maximum contrast increases with the diffusion length of excess charge and decreases with increasing X-ray beam width. The simulated XBIC profile contrasts are compared to experimentally measured patterns.
Received: 20.03.2012
English version:
Technical Physics Letters, 2012, Volume 38, Issue 10, Pages 913–916
DOI: https://doi.org/10.1134/S1063785012100239
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: Ya. L. Shabelnikova, E. B. Yakimov, M. V. Grigor'ev, R. R. Fakhrtdinov, V. A. Bushuev, “Calculating the extended defect contrast for the X-ray-beam-induced current method”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 38:20 (2012), 1–7; Tech. Phys. Lett., 38:10 (2012), 913–916
Citation in format AMSBIB
\Bibitem{ShaYakGri12}
\by Ya.~L.~Shabelnikova, E.~B.~Yakimov, M.~V.~Grigor'ev, R.~R.~Fakhrtdinov, V.~A.~Bushuev
\paper Calculating the extended defect contrast for the X-ray-beam-induced current method
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2012
\vol 38
\issue 20
\pages 1--7
\mathnet{http://mi.mathnet.ru/pjtf8976}
\elib{https://elibrary.ru/item.asp?id=20328001}
\transl
\jour Tech. Phys. Lett.
\yr 2012
\vol 38
\issue 10
\pages 913--916
\crossref{https://doi.org/10.1134/S1063785012100239}
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    • This publication is cited in the following 9 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
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