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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2012, Volume 38, Issue 20, Pages 50–56
(Mi pjtf8983)
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This article is cited in 6 scientific papers (total in 6 papers)
Plasmachemical synthesis of aluminum-based nitride compounds in vacuum-arc discharge plasma
Yu. A. Bystrovabc, N. Z. Vetrovabc, A. A. Lisenkovabc a Saint Petersburg Electrotechnical University "LETI"
b SED-SPb Company, St. Petersburg
c Institute of Problems of Mechanical Engineering, Russian Academy of Sciences, St. Petersburg
Abstract:
A vacuum-arc plasmachemical synthesis of aluminum-based nitride compounds (AlN and Ti–Al–N) is described. The compositions and structures of the obtained coatings have been studied. It is shown that the composition and structure of a coating can be effectively controlled by varying the discharge current, ion current density distribution, and gas pressure, provided that the plasma flow is free of droplets.
Received: 14.06.2012
Citation:
Yu. A. Bystrov, N. Z. Vetrov, A. A. Lisenkov, “Plasmachemical synthesis of aluminum-based nitride compounds in vacuum-arc discharge plasma”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 38:20 (2012), 50–56; Tech. Phys. Lett., 38:10 (2012), 938–940
Linking options:
https://www.mathnet.ru/eng/pjtf8983 https://www.mathnet.ru/eng/pjtf/v38/i20/p50
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