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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2012, Volume 38, Issue 20, Pages 50–56 (Mi pjtf8983)  

This article is cited in 6 scientific papers (total in 6 papers)

Plasmachemical synthesis of aluminum-based nitride compounds in vacuum-arc discharge plasma

Yu. A. Bystrovabc, N. Z. Vetrovabc, A. A. Lisenkovabc

a Saint Petersburg Electrotechnical University "LETI"
b SED-SPb Company, St. Petersburg
c Institute of Problems of Mechanical Engineering, Russian Academy of Sciences, St. Petersburg
Full-text PDF (786 kB) Citations (6)
Abstract: A vacuum-arc plasmachemical synthesis of aluminum-based nitride compounds (AlN and Ti–Al–N) is described. The compositions and structures of the obtained coatings have been studied. It is shown that the composition and structure of a coating can be effectively controlled by varying the discharge current, ion current density distribution, and gas pressure, provided that the plasma flow is free of droplets.
Received: 14.06.2012
English version:
Technical Physics Letters, 2012, Volume 38, Issue 10, Pages 938–940
DOI: https://doi.org/10.1134/S1063785012100173
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: Yu. A. Bystrov, N. Z. Vetrov, A. A. Lisenkov, “Plasmachemical synthesis of aluminum-based nitride compounds in vacuum-arc discharge plasma”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 38:20 (2012), 50–56; Tech. Phys. Lett., 38:10 (2012), 938–940
Citation in format AMSBIB
\Bibitem{BysVetLis12}
\by Yu.~A.~Bystrov, N.~Z.~Vetrov, A.~A.~Lisenkov
\paper Plasmachemical synthesis of aluminum-based nitride compounds in vacuum-arc discharge plasma
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2012
\vol 38
\issue 20
\pages 50--56
\mathnet{http://mi.mathnet.ru/pjtf8983}
\elib{https://elibrary.ru/item.asp?id=20328008}
\transl
\jour Tech. Phys. Lett.
\yr 2012
\vol 38
\issue 10
\pages 938--940
\crossref{https://doi.org/10.1134/S1063785012100173}
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  • This publication is cited in the following 6 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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