Ionization dynamics in the laser plasma in a low pressure gas target

In Xe-laser-plasma short-wave-radiation sources, the laser-energy-to-EUV conversion efficiency (CE) turns out to be substantially lower than theoretical expectations. An estimation made in the present work is evidence of what a long period of the primary ionization, lasting up to a moment when high-Z ions appear to emit short-wave photons, can be considered as a main cause for the low CE values. During that period the plasma remains low-ionized and absorbs weakly the laser energy. Data deduced from laser light absorption measurements confirm the estimation above. A preionization of the gas target with the UV excimer laser pulse is proposed as a method to accelerate the ionization process.