B. Jeong, B. Lee, J. H. Kim, J. A. Choi, J. H. Yang, E. G. Sall', J. W. Kim, D. Heo, J. Jang, G. H. Kim, V. E. Yashin, “Drilling of sub-100 μm hourglass-shaped holes in diamond with femtosecond laser pulses”, Kvantovaya Elektronika, 50:2 (2020), 201–204 [Quantum Electron., 50:2 (2020), 201

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Kvantovaya Elektronika, 2020, Volume 50, Number 2, Pages 201–204 (Mi qe17187)

This article is cited in 18 scientific papers (total in 18 papers)

Laser applications and other topics in quantum electronics

Drilling of sub-100 μm hourglass-shaped holes in diamond with femtosecond laser pulses

B. Jeong^ab, B. Lee^a, J. H. Kim^c, J. A. Choi^c, J. H. Yang^a, E. G. Sall'^a, J. W. Kim^a, D. Heo^a, J. Jang^bd, G. H. Kim^a, V. E. Yashin^e

^a Electro-Medical Device Research Center, Korea Electrotechnology Research Institute, Republic of Korea
^b Department of Creative IT Engineering, Pohang University of Science and Technology, Republic of Korea
^c GK UP, Republic of Korea
^d School of Interdisciplinary Bioscience and Bioengineering, Pohang University of Science and Technology, Republic of Korea
^e All-Russian Research Center "S. I. Vavilov State Optical Institute", St. Petersburg

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Abstract: We present images of microholes drilled in diamond using a homemade femtosecond Yb : KGW laser. We use a femtosecond laser source emitting pulses with a duration of 230 fs at a wavelength of 1030 nm, the focusing spot size amounting to 8.9 μm. The effect of the pulse energy and the number of pulses on the microhole geometry (hole diameter, circularity, taper angle, and drilling quality) is evaluated. The obtained results demonstrate the feasibility of drilling of hourglass-shaped holes in a diamond sample, which have similar diameters at the hole entrance (92 μm) and exit (95 μm), but a much smaller diameter (28 μm) at a certain waist section inside the hole.

Keywords: femtosecond laser, ultrafast laser, laser micromachining, laser drilling, diamond.

Funding agency	Grant number
Ministry of Science and ICT, Korea	16-12-N0101-85 IITP-2019-2011-1-00783

Received: 18.07.2019
Revised: 14.10.2019

English version:
Quantum Electronics, 2020, Volume 50, Issue 2, Pages 201–204
DOI: https://doi.org/10.1070/QEL17097

Bibliographic databases:

Document Type: Article

Language: Russian

Citation: B. Jeong, B. Lee, J. H. Kim, J. A. Choi, J. H. Yang, E. G. Sall', J. W. Kim, D. Heo, J. Jang, G. H. Kim, V. E. Yashin, “Drilling of sub-100 μm hourglass-shaped holes in diamond with femtosecond laser pulses”, Kvantovaya Elektronika, 50:2 (2020), 201–204 [Quantum Electron., 50:2 (2020), 201–204]

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https://www.mathnet.ru/eng/qe17187

https://www.mathnet.ru/eng/qe/v50/i2/p201

This publication is cited in the following 18 articles:

Citing articles in Google Scholar: Russian citations, English citations
Related articles in Google Scholar: Russian articles, English articles

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