The Formation of Inorganic Coatings in the Decomposition of Organometallic Compounds

The present status of the methods for producing inorganic coatings from the vapour phase by the decomposition of organometallic compounds (OMC) is considered critically and systematically. The methods are classified in terms of physicochemical features and the physical procedures involved. The efficiencies of various methods for the preparation of coatings from the vapour phase in the thermal decomposition of OMC and the possibilities of their employment for a specific alteration of the properties of the coatings obtained are compared. Patent data on various procedures and devices used in the formation of inorganic coatings from the vapour phase in the decomposition of OMC are widely used.
The bibliography includes 96 references.