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Russian Chemical Reviews, 2014, Volume 83, Issue 8, Pages 758–782
DOI: https://doi.org/10.1070/RC2014v083n08ABEH004402 (Mi rcr711) 		 
This article is cited in 10 scientific papers (total in 10 papers)

Chemical vapour-phase deposition of ruthenium-containing thin films

V. Yu. Vasilevab, N. B. Morozovac, I. K. Igumenovc

a Novosibirsk State Technical University
b 'SibIS', Limited Liability Company, Novosibirsk, Russia
c Nikolaev Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Novosibirsk
English full-text Citations (10) Russian version article
DOI: https://doi.org/10.1070/RC2014v083n08ABEH004402
URL: https://www.uspkhim.ru/RCR4402
Abstract: Chemical and materials science aspects of formation of ruthenium-containing thin films for modern high-precision technologies by chemical vapour deposition (CVD) methods are considered. Chemical approaches to the synthesis of main precursors used in MOCVD techniques, layer growth processes as well as main physicochemical and electrical properties of ruthenium-containing thin films are analyzed.
Bibliography — 120 references.
Received: 24.04.2013
Bibliographic databases:
Language: English
Original paper language: Russian
Citation: V. Yu. Vasilev, N. B. Morozova, I. K. Igumenov, “Chemical vapour-phase deposition of ruthenium-containing thin films”, Russian Chem. Reviews, 83:8 (2014), 758–782
Citation in format AMSBIB
\Bibitem{VasMorIgu14}
\by V.~Yu.~Vasilev, N.~B.~Morozova, I.~K.~Igumenov
\paper Chemical vapour-phase deposition of ruthenium-containing thin films
\jour Russian Chem. Reviews
\yr 2014
\vol 83
\issue 8
\pages 758--782
\mathnet{http://mi.mathnet.ru/eng/rcr711}
\crossref{https://doi.org/10.1070/RC2014v083n08ABEH004402}
\isi{https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=Publons&SrcAuth=Publons_CEL&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=000343310000004}
\elib{https://elibrary.ru/item.asp?id=21818616}
\scopus{https://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-84906905523}
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  • https://doi.org/10.1070/RC2014v083n08ABEH004402
  • https://www.mathnet.ru/eng/rcr/v83/i8/p758
    • This publication is cited in the following 10 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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