New approaches to three-dimensional dislocation reconstruction in silicon from X-ray topo-tomography data

We present the results of processing the diffraction patterns of dislocation half-loops in Si(111) silicon single crystal, which were recorded by X-ray topo-tomography (XTT) at the European Synchrotron Radiation Facility (ESRF). An algorithm for preprocessing two-dimensional images by automatic noise filtering was proposed and solution reliability criteria were developed, which enabled a significant improvement in the quality of three-dimensional reconstruction of the spatial distribution of the defects under study. The experimental patterns were compared with those simulated numerically using the solution of Takagi equations. This approach made it possible not only to determine the geometry of the defects but also to derive information about the Burgers vector.