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Uchenye Zapiski Kazanskogo Universiteta. Seriya Fiziko-Matematicheskie Nauki, 2013, Volume 155, Book 2, Pages 123–130 (Mi uzku1202)  
This article is cited in 1 scientific paper (total in 1 paper)

Modeling of a High-Frequency Capacitive Discharge with a Large Inter-Electrode Distance. I. Statement of the Problem

I. Sh. Abdullina, V. S. Zheltukhinb, V. Yu. Chebakovab, M. N. Shneiderc

a Kazan National Research Technological University
b Kazan (Volga Region) Federal University
c Princeton University
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Abstract: We construct a one-dimensional mathematical model of a transient high-frequency low-pressure plasma, which makes it possible to determine the basic characteristics of the plasma in a high-frequency low-pressure capacitive discharge with a large inter-electrode distance and describe the plasma's behavior in the near-electrode regions taking into account the heating of the gas.
Keywords: mathematical modeling, high-frequency low-pressure capacitive discharge, electric field strength, electronic and gas temperature, concentration of electrons, ions.
Received: 03.04.2013
Document Type: Article
UDC: 537.525.7+621.762
Language: Russian
Citation: I. Sh. Abdullin, V. S. Zheltukhin, V. Yu. Chebakova, M. N. Shneider, “Modeling of a High-Frequency Capacitive Discharge with a Large Inter-Electrode Distance. I. Statement of the Problem”, Uchenye Zapiski Kazanskogo Universiteta. Seriya Fiziko-Matematicheskie Nauki, 155, no. 2, Kazan University, Kazan, 2013, 123–130
Citation in format AMSBIB
\Bibitem{AbdZheChe13}
\by I.~Sh.~Abdullin, V.~S.~Zheltukhin, V.~Yu.~Chebakova, M.~N.~Shneider
\paper Modeling of a High-Frequency Capacitive Discharge with a Large Inter-Electrode Distance. I. Statement of the Problem
\serial Uchenye Zapiski Kazanskogo Universiteta. Seriya Fiziko-Matematicheskie Nauki
\yr 2013
\vol 155
\issue 2
\pages 123--130
\publ Kazan University
\publaddr Kazan
\mathnet{http://mi.mathnet.ru/uzku1202}
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    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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