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Zhurnal Vychislitel'noi Matematiki i Matematicheskoi Fiziki, 2025, Volume 65, Number 4, Pages 515–527
DOI: https://doi.org/10.31857/S0044466925040085 (Mi zvmmf11956) 		 
Partial Differential Equations

Choosing the broadband monitoring algorithm for the deposition process of optical coatings with accounting for the self-compensation effect of errors

A. N. Sharovab, A. V. Tikhonravovcd, S. A. Sharapovac, A. G. Yagolaa

a Faculty of Physics, Lomonosov Moscow State University, 119992, Moscow, Russia
b Shenzhen MSU-BIT University, Faculty of Computational Mathematics and Cybernetics, Shenzhen, China
c Research Computing Center, Lomonosov Moscow State University, 119991, Moscow, Russia
d Moscow Center for Fundamental and Applied Mathematics, 119991, Moscow, Russia
English version article
DOI: https://doi.org/10.31857/S0044466925040085
Abstract: Two algorithms for broadband optical monitoring of the deposition of optical coatings are considered: the first one is without solving the additional inverse problem for refining the thicknesses of already deposited layers, the second one is with its solution. It is shown that refinement of the thicknesses of already deposited layers reduces errors in the layer thicknesses, but does not always provide a more accurate implementation of the required spectral properties of the coating. It is demonstrated for the first time that when choosing a control algorithm, the presence of the error self-compensation effect should be taken into account.
Key words: mathematical modeling, computational algorithms, inverse problems, optical coatings, coating deposition, broadband control, error correlation, error self-compensation.
Funding agency Grant number
Lomonosov Moscow State University 23-Ш05-23
Moscow Center of Fundamental and Applied Mathematics 075-15-2022-284
This work was supported by the Interdisciplinary School of Moscow University Mathematical Analysis of Complex Systems, project no. 23-Sh05-23 Direct and Inverse Spectral Problems in Mathematical Physics.
The part of the work related to the organization and optimization of supercomputer computations was carried out with the support of the Ministry of Science and Higher Education of the Russian Federation in the framework of the program of the Moscow Center for Fundamental and Applied Mathematics under contract no. 075-15-2022-284.
Received: 07.12.2024
Revised: 07.12.2024
Accepted: 04.02.2025
English version:
Computational Mathematics and Mathematical Physics, 2025, Volume 65, Issue 4, Pages 812–824
DOI: https://doi.org/10.1134/S0965542525700113
Bibliographic databases:
Document Type: Article
UDC: 535.4
Language: Russian
Citation: A. N. Sharov, A. V. Tikhonravov, S. A. Sharapova, A. G. Yagola, “Choosing the broadband monitoring algorithm for the deposition process of optical coatings with accounting for the self-compensation effect of errors”, Zh. Vychisl. Mat. Mat. Fiz., 65:4 (2025), 515–527; Comput. Math. Math. Phys., 65:4 (2025), 812–824
Citation in format AMSBIB
\Bibitem{ShaTikSha25}
\by A.~N.~Sharov, A.~V.~Tikhonravov, S.~A.~Sharapova, A.~G.~Yagola
\paper Choosing the broadband monitoring algorithm for the deposition process of optical coatings with accounting for the self-compensation effect of errors
\jour Zh. Vychisl. Mat. Mat. Fiz.
\yr 2025
\vol 65
\issue 4
\pages 515--527
\mathnet{http://mi.mathnet.ru/zvmmf11956}
\elib{https://elibrary.ru/item.asp?id=82358156}
\transl
\jour Comput. Math. Math. Phys.
\yr 2025
\vol 65
\issue 4
\pages 812--824
\crossref{https://doi.org/10.1134/S0965542525700113}
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