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Zhurnal Vychislitel'noi Matematiki i Matematicheskoi Fiziki, 2008, Volume 48, Number 10, Pages 1908–1920 (Mi zvmmf4552)  
This article is cited in 1 scientific paper (total in 1 paper)

Methods for computer simulation of crystal sputtering

E. Yu. Zykova, A. S. Mosunov, V. E. Yurasova

Faculty of Physics, Moscow State University, Moscow, 119992, Russia
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Abstract: A computer program for molecular dynamics simulation of sputtering is developed. Numerical methods for the integration of the equations of motion are described. Algorithms for constructing models of single-and polycrystalline targets are proposed. The applicability of various ion-atom and atom-atom interaction potentials to sputtering computations is analyzed.
Key words: computer simulation, crystal sputtering, molecular dynamics methods, single crystals, polycrystals.
Received: 20.12.2007
English version:
Computational Mathematics and Mathematical Physics, 2008, Volume 48, Issue 10, Pages 1904–1914
DOI: https://doi.org/10.1134/S0965542508100126
Bibliographic databases:
Document Type: Article
UDC: 519.634
Language: Russian
Citation: E. Yu. Zykova, A. S. Mosunov, V. E. Yurasova, “Methods for computer simulation of crystal sputtering”, Zh. Vychisl. Mat. Mat. Fiz., 48:10 (2008), 1908–1920; Comput. Math. Math. Phys., 48:10 (2008), 1904–1914
Citation in format AMSBIB
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    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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