Regularizing algorithms for the determination of thickness of deposited layers in optical coating production

Production of the modern advanced multi-layer optical coatings requires on-line monitoring of the growing layer thickness. We present regularizing algorithms for the continuous on-line determination of the deposited layer thickness that can be used in the coating production with broadband optical monitoring. These algorithms are based on minimization of the Tikhonov functional as well as on the allocation of the correctness set. Numerical experiments confirm the effectiveness of the proposed algorithms.