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This article is cited in 2 scientific papers (total in 2 papers)
Continued publication of the materials of the seminar in FTT N 12/21
Ferroelectricity
A weak manifestation of the field effect in metal-dielectric-semiconductor structures with a ferroelectric insulating layer
Ba$_{x}$Sr$_{1-x}$TiO$_{3}$
D. A. Belorusov, E. I. Goldman, G. V. Chucheva Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch, Russian Academy of Sciences, Fryazino, Moscow oblast, Russia
Abstract:
High-frequency measurements of the capacitance and conductivity of Ba$_{x}$Sr$_{1-x}$TiO$_{3}$-Pt and Ba$_{x}$Sr$_{1-x}$TiO$_{3}$-Si objects with a ferroelectric thickness of 120 nm in the paraelectric phase were carried out. It is shown that in the entire range of external voltages, the electric field practically does not penetrate Si. The conclusion made earlier about the reasons for the weak manifestation of the field effect is confirmed – the polarization of the ferroelectric layer is almost completely shielded by the charges of electronic traps at the Ba$_{x}$Sr$_{1-x}$TiO$_{3}$-Si contact. It is noted that a sharp decrease due to passivation of the activity of surface traps will allow implementing transistors based on metal-BST-Si structures with a working surface channel of non-basic charge carriers and will ensure the construction of high-quality FeRAM non-volatile memory cells.
Keywords:
metal-dielectric-semiconductor-structures, metal-dielectric-metal-structures, ferroelectric films of the composition Ba$_{x}$Sr$_{1-x}$TiO$_{3}$, high-frequency impedance.
Received: 29.06.2021 Revised: 29.06.2021 Accepted: 03.07.2021
Citation:
D. A. Belorusov, E. I. Goldman, G. V. Chucheva, “A weak manifestation of the field effect in metal-dielectric-semiconductor structures with a ferroelectric insulating layer
Ba$_{x}$Sr$_{1-x}$TiO$_{3}$”, Fizika Tverdogo Tela, 63:11 (2021), 1887–1889
Linking options:
https://www.mathnet.ru/eng/ftt7963 https://www.mathnet.ru/eng/ftt/v63/i11/p1887
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