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Zhurnal Tekhnicheskoi Fiziki, 1992, Volume 62, Issue 2, Pages 41–46
(Mi jtf4556)
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Gas Discharges, Plasmas
DETERMINATION OF ULTIMATE SELECTIVE COEFFICIENTS OF HOLLOW-CATHODE
SPUTTERING IN HYDROGEN PLASMA
V. V. Dunaev, A. G. Zhiglinskiĭ, V. S. Sukhomlinov, E. N. Fafurina
Citation:
V. V. Dunaev, A. G. Zhiglinskiǐ, V. S. Sukhomlinov, E. N. Fafurina, “DETERMINATION OF ULTIMATE SELECTIVE COEFFICIENTS OF HOLLOW-CATHODE
SPUTTERING IN HYDROGEN PLASMA”, Zhurnal Tekhnicheskoi Fiziki, 62:2 (1992), 41–46
Linking options:
https://www.mathnet.ru/eng/jtf4556 https://www.mathnet.ru/eng/jtf/v62/i2/p41
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| Statistics & downloads: |
| Abstract page: | 82 | | Full-text PDF : | 41 |
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