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Matematicheskoe modelirovanie, 1996, Volume 8, Number 10, Pages 113–127 (Mi mm1637)  
This article is cited in 3 scientific papers (total in 4 papers)

Computational methods and algorithms

Analysis of mathematical model of silicon wafers contamination based on discrete sources method

Yu. A. Eremin, N. V. Orlov, A. G. Sveshnikov

M. V. Lomonosov Moscow State University
Full-text PDF (1130 kB) Citations (4)
Abstract: On the basis of discrete sources method the complete mathematical model for the problem of light scattering from a penetrable particle located at an interface surface is considered. Numerical aspects of the problem are examined. Some examples of numerical analysis are given.
Received: 27.11.1995
Bibliographic databases:
Language: Russian
Citation: Yu. A. Eremin, N. V. Orlov, A. G. Sveshnikov, “Analysis of mathematical model of silicon wafers contamination based on discrete sources method”, Matem. Mod., 8:10 (1996), 113–127
Citation in format AMSBIB
\Bibitem{EreOrlSve96}
\by Yu.~A.~Eremin, N.~V.~Orlov, A.~G.~Sveshnikov
\paper Analysis of mathematical model of silicon wafers contamination based on discrete sources method
\jour Matem. Mod.
\yr 1996
\vol 8
\issue 10
\pages 113--127
\mathnet{http://mi.mathnet.ru/mm1637}
\mathscinet{http://mathscinet.ams.org/mathscinet-getitem?mr=1432804}
\zmath{https://zbmath.org/?q=an:1063.74535}
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  • https://www.mathnet.ru/eng/mm/v8/i10/p113
    • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Математическое моделирование
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