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Физика и техника полупроводников, 2021, том 55, выпуск 10, страница 948
(Mi phts6631)
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Эта публикация цитируется в 4 научных статьях (всего в 4 статьях)
Поверхность, границы раздела, тонкие пленки
Waveguiding regime control by varying the refractive index for MgZnO sprayed thin films
Y. Bouachibaa, A. Taaboucheb, A. Bouabelloub, A. M. Zemiechea, N. Ghellila, H. Serrarc, R. Aouatib, H. Djaaboubeb, F. Haninid, C. Boukentouchae a Laboratoire Technologie des Matériaux Avancées, Ecole Nationale Polytechnique de Constantine Malek BENNABI,
BP 75A RP Ali Mendjeli – Constantine, Algérie
b Laboratoire Couches Minces et Interfaces, Université de Fréeres Mentouri Constantine 1, Constantine, Algérie
c Research Center in Industrial Technologies (CRTI), BP 64 Cheraga (Alger), Algeria
d Applied and Theoretical Physics Laboratory, University of Larbi Tébessi Tébessa, Constantine Road 12002, Tébessa, Algeria
e Environmental Chemistry and Structural Molecular Research Unit, University of Fréres Mentouri Constantine 1, Constantine, Algeria
Аннотация:
In this work, ZnO and MgZnO thin films were deposited onto glass substrates by spray pyrolysis processes. The structural, optical, electrical, and waveguiding properties of the films were studied over Mg doping levels ranging from 0 to 30 at.%. With an increase of Mg concentration up to 20 at.%, XRD investigation reveals that the films crystallize in single ZnO wurtzite structure with a preferential $c$-axis orientation. Beyond the solubility limit, phase mixture of MgO cubic rocksalt-type and ZnO wurtzite was taken place. The band gap energy increases from 3.26 to 3.53 eV as Mg concentration increases from 0 to 30 at.%. The carrier concentration considerably decreases from 5.737 $\cdot$ 10$^{14}$ to 1.111 $\cdot$ 10$^{13}$ cm$^{-3}$, and the resistivity drastically increases from 19 to 1688 $\Omega$ $\cdot$ cm as Mg content increases from 0 to 5 at.%. A great attention has been paid to waveguiding measurements by prism coupler technique. The films were bi-guided up to 15%, single-guided at 20%, and none-guided transverse electric/transverse magnetic polarized modes at 30 at.% of Mg concentration. Simultaneously, the refractive index was found to be decreased with Mg doping.
Ключевые слова:
MgZnO, spray pyrolysis, band gap, waveguide, refractive index.
Поступила в редакцию: 05.04.2021 Исправленный вариант: 05.04.2021 Принята в печать: 18.05.2021
Образец цитирования:
Y. Bouachiba, A. Taabouche, A. Bouabellou, A. M. Zemieche, N. Ghellil, H. Serrar, R. Aouati, H. Djaaboube, F. Hanini, C. Boukentoucha, “Waveguiding regime control by varying the refractive index for MgZnO sprayed thin films”, Физика и техника полупроводников, 55:10 (2021), 948; Semiconductors, 55 (2021), S72–S79
Образцы ссылок на эту страницу:
https://www.mathnet.ru/rus/phts6631 https://www.mathnet.ru/rus/phts/v55/i10/p948
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