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Pisma v Zhurnal Tekhnicheskoi Fiziki, 1991, Volume 17, Issue 5, Pages 69–72
(Mi pjtf3714)
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FLUCTUATIONS OF ION CHARGE STATES - POSSIBLE REASON FOR INCREASE OF
SHOOT DISPERSION UNDER HIGH-ENERGY IONIC IMPLANTATION
A. F. Burenkov, F. F. Komarov, S. A. Fedotov
Citation:
A. F. Burenkov, F. F. Komarov, S. A. Fedotov, “FLUCTUATIONS OF ION CHARGE STATES - POSSIBLE REASON FOR INCREASE OF
SHOOT DISPERSION UNDER HIGH-ENERGY IONIC IMPLANTATION”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 17:5 (1991), 69–72
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https://www.mathnet.ru/eng/pjtf3714 https://www.mathnet.ru/eng/pjtf/v17/i5/p69
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Abstract page: | 57 | Full-text PDF : | 26 |
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