Pisma v Zhurnal Tekhnicheskoi Fiziki
RUS  ENG    JOURNALS   PEOPLE   ORGANISATIONS   CONFERENCES   SEMINARS   VIDEO LIBRARY   PACKAGE AMSBIB  
General information
Latest issue
Archive
Guidelines for authors

Search papers
Search references

RSS
Latest issue
Current issues
Archive issues
What is RSS


Pisma v Zhurnal Tekhnicheskoi Fiziki:
Year:
Volume:
Issue:
Page:
Find




Personal entry:
Login:
Password:
Save password
Enter
Forgotten password?
Register

Pisma v Zhurnal Tekhnicheskoi Fiziki, 2022, Volume 48, Issue 7, Pages 16–19
DOI: https://doi.org/10.21883/PJTF.2022.07.52286.19085 (Mi pjtf7275) 		 
This article is cited in 2 scientific papers (total in 2 papers)

Functionalization of low-k surfaces with low-energy Ar ions

A. A. Solovykha, A. A. Sychevab, E. N. Voroninaab

a Lomonosov Moscow State University, Moscow, Russia
b Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics, Moscow, Russia
Full-text PDF (252 kB) Citations (2)
DOI: https://doi.org/10.21883/PJTF.2022.07.52286.19085
Abstract: In this work low-energy Ar impacts on low-k surfaces were simulated with ab initio density functional theory method. The obtained results reveal the mechanism of CH$_3$-group removal under Ar atom/ion irradiation; the threshold energy of this process was estimated.
Keywords: low-k dielectrics, functionalization, simulation, diffusion barriers, methyl groups.
Funding agency Grant number
Russian Foundation for Basic Research 18-29-27001
This study was supported by the Russian Foundation for Basic Research, grant № 18-29-27001.
Received: 19.11.2021
Revised: 13.01.2022
Accepted: 16.01.2022
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. A. Solovykh, A. A. Sycheva, E. N. Voronina, “Functionalization of low-k surfaces with low-energy Ar ions”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 48:7 (2022), 16–19
Citation in format AMSBIB
\Bibitem{SolSycVor22}
\by A.~A.~Solovykh, A.~A.~Sycheva, E.~N.~Voronina
\paper Functionalization of \emph{low-k} surfaces with low-energy Ar ions
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2022
\vol 48
\issue 7
\pages 16--19
\mathnet{http://mi.mathnet.ru/pjtf7275}
\crossref{https://doi.org/10.21883/PJTF.2022.07.52286.19085}
\elib{https://elibrary.ru/item.asp?id=48334024}
Linking options:
  • https://www.mathnet.ru/eng/pjtf7275
  • https://www.mathnet.ru/eng/pjtf/v48/i7/p16
    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
    Statistics & downloads:
    Abstract page:278
    Full-text PDF :86
    References:1
     
      Contact us:
    		  Terms of Use  Registration to the website  Logotypes © Steklov Mathematical Institute RAS, 2026