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Plasma Investigations
Effect of electron-cyclotron resonance conditions in a microwave discharge of an ion source on the extracted current
D. S. Stepanov, E. Ya. Shkolnikov National Engineering Physics Institute "MEPhI", Moscow
Abstract:
A model of a microwave discharge in the electron-cyclotron resonance mode based on the direct solution of the Boltzmann kinetic equation, without using the Maxwellian electron distribution function approximation, is considered. A significantly different dependence of the discharge development dynamics on the parameters of the electric and magnetic fields is shown than for the Maxwell distribution function, which consists of a sharp transition of the plasma electrons to the runaway mode when a certain field value is exceeded. The simulation results explain the experimental dependences of the ion current density extracted from the microwave ion source with electron-cyclotron resonance on the magnetic field distribution. A more general principle is formulated for choosing the distribution of the magnetic field for such a source, which ensures the maximum ion current.
Received: 07.10.2020 Revised: 07.10.2020 Accepted: 19.05.2021
Citation:
D. S. Stepanov, E. Ya. Shkolnikov, “Effect of electron-cyclotron resonance conditions in a microwave discharge of an ion source on the extracted current”, TVT, 60:2 (2022), 184–190; High Temperature, 60:2 (2022), 159–164
Linking options:
https://www.mathnet.ru/eng/tvt11504 https://www.mathnet.ru/eng/tvt/v60/i2/p184
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Abstract page: | 115 | Full-text PDF : | 53 | References: | 18 |
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