Teplofizika vysokikh temperatur
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Teplofizika vysokikh temperatur, 1992, Volume 30, Issue 2, Pages 372–378 (Mi tvt3283)  
Methods of Experimental Investigation and Measurements

Measuring the temperature of a silicon chip in a plasmochemical reactor by laser interferometry

A. N. Magunov, E. V. Mudrov

Institute of Microelectronics of the Russian Academy of Sciences, Yaroslavl
Full-text PDF (261 kB)
Received: 24.10.1990
Bibliographic databases:
Document Type: Article
UDC: 533.924+535.417+536.5+621.315.592
Language: Russian
Citation: A. N. Magunov, E. V. Mudrov, “Measuring the temperature of a silicon chip in a plasmochemical reactor by laser interferometry”, TVT, 30:2 (1992), 372–378; High Temperature, 30:2 (1992), 300–305
Citation in format AMSBIB
\Bibitem{MagMud92}
\by A.~N.~Magunov, E.~V.~Mudrov
\paper Measuring the temperature of a silicon chip in a plasmochemical reactor by laser interferometry
\jour TVT
\yr 1992
\vol 30
\issue 2
\pages 372--378
\mathnet{http://mi.mathnet.ru/tvt3283}
\transl
\jour High Temperature
\yr 1992
\vol 30
\issue 2
\pages 300--305
\isi{https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=Publons&SrcAuth=Publons_CEL&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=A1992LB60000022}
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  • https://www.mathnet.ru/eng/tvt3283
  • https://www.mathnet.ru/eng/tvt/v30/i2/p372
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