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Teplofizika vysokikh temperatur, 1989, Volume 27, Issue 6, Pages 1185–1189 (Mi tvt4102)  
Methods of Experimental Investigation and Measurements

Synthesis of thin-films of aluminum nitride

A. V. Kirillin, A. V. Kostanovskii, L. A. Zhylyakov

Institute for High Temperatures, USSR Academy of Sciences, Moscow
Full-text PDF (371 kB)
Received: 22.12.1988
Bibliographic databases:
Document Type: Article
UDC: 546.621.171.1:539.216
Language: Russian
Citation: A. V. Kirillin, A. V. Kostanovskii, L. A. Zhylyakov, “Synthesis of thin-films of aluminum nitride”, TVT, 27:6 (1989), 1185–1189; High Temperature, 27:6 (1989), 948–952
Citation in format AMSBIB
\Bibitem{KirKosZhy89}
\by A.~V.~Kirillin, A.~V.~Kostanovskii, L.~A.~Zhylyakov
\paper Synthesis of thin-films of aluminum nitride
\jour TVT
\yr 1989
\vol 27
\issue 6
\pages 1185--1189
\mathnet{http://mi.mathnet.ru/tvt4102}
\transl
\jour High Temperature
\yr 1989
\vol 27
\issue 6
\pages 948--952
\isi{https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=Publons&SrcAuth=Publons_CEL&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=A1989DY47000022}
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