MEMS, analysis of mechanical stresses, applications of optical research methods
Main publications:
Dedkova A.A., Dyuzhev N.A., Gisev E.E., Shtern M.Yu., “Fast Nondestructive Technique for Analyzing Deflection of Membranes Located on the Substrate”, Russian Journal of Nondestructive Testing, 5:5 (2020), 52-59
Dedkova A.A., Nikiforov M.O., Mitko S.V., Kireev V.Yu., “Investigation of Gallium Nitride Island Films on Sapphire Substrates via Scanning Electron Microscopy and Spectral Ellipsometry”, Nanotechnologies in Russia, 14:3-4 (2019), 176-183
Novak A.V., Novak V.R., Dedkova A.A., Gusev E.E., “Dependence of Mechanical Stresses in Silicon Nitride Films on the Mode of Plasma-Enhanced Chemical Vapor Deposition”, Semiconductors, 52:15 (2018), 1953-1957
A. A. Dedkova, I. V. Florinsky, A. K. Chernyshev, “The use of morphometric variables in the surface topography study of X-ray optical elements”, Zhurnal Tekhnicheskoi Fiziki, 93:7 (2023), 1059–1068
2022
2.
A. A. Dedkova, N. A. Djuzhev, “Investigation of the real shape changes of round thin-film membranes during the bulge testing”, Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022), 1253–1260
3.
A. A. Dedkova, I. V. Florinsky, N. A. Djuzhev, “Technique for investigation of the shape changes of wafers and thin-film membranes by using geomorphometric approaches”, Zhurnal Tekhnicheskoi Fiziki, 92:8 (2022), 1113–1123
A. A. Dedkova, I. V. Florinsky, N. A. Djuzhev, “Approaches to determining curvature of wafers by their topography”, UFN, 192:7 (2022), 754–771; Phys. Usp., 65:7 (2022), 706–722
A. A. Dedkova, P. Y. Glagolev, E. È. Gusev, N. A. Djuzhev, V. Yu. Kireev, S. A. Lychev, D. A. Tovarnov, “Peculiarities of deformation of round thin-film membranes and experimental determination of their effective characteristics”, Zhurnal Tekhnicheskoi Fiziki, 91:10 (2021), 1454–1465
M. Yu. Shtern, A. O. Kozlov, Yu. I. Shtern, M. S. Rogachev, E. P. Korchagin, B. R. Mustafoev, A. A. Dedkova, “Obtaining and investigation of ohmic contacts with high adhesion to thermoelements”, Fizika i Tekhnika Poluprovodnikov, 55:12 (2021), 1097–1104
N. A. Djuzhev, E. È. Gusev, A. A. Dedkova, D. A. Tovarnov, M. A. Makhiboroda, “Experimental determination of mechanical properties of the anode cell of an X-ray lithograph”, Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020), 1838–1842; Tech. Phys., 65:11 (2020), 1755–1759
M. D. Tyugaev, A. V. Kharitonov, A. R. Gazizov, A. I. Fishman, M. Kh. Salakhov, A. A. Dedkova, A. M. Alekseev, A. V. Shelaev, S. S. Kharintsev, “Stimulated Raman scattering in metal-dielectric nanocomposites with spectrally degenerate dielectric constant”, Pis'ma v Zh. Èksper. Teoret. Fiz., 110:12 (2019), 772–776; JETP Letters, 110:12 (2019), 766–770
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