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Publications in Math-Net.Ru |
Citations |
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2026 |
| 1. |
A. A. Solovykh, E. N. Voronina, Yu. A. Mankelevich, L. S. Novikov, “Mechanisms of fluorocarbon film destruction during atomic layer etching of silicon dioxide”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 52:13 (2026), 38–42   |
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2023 |
| 2. |
S. A. Khlebnikov, A. A. Solovykh, Yu. A. Mankelevich, E. N. Voronina, “N$_2$ plasma interaction with molybdenum disulfide monolayers”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 49:18 (2023), 8–11 |
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2022 |
| 3. |
D. V. Lopaev, D. E. Melezhenko, A. I. Zotovich, E. N. Voronina, “Study of H, N, and O atom interaction with quasi-two-dimensional molybdenum disulfide”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 48:22 (2022), 28–32 |
| 4. |
A. A. Solovykh, A. A. Sycheva, E. N. Voronina, “Functionalization of low-k surfaces with low-energy Ar ions”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 48:7 (2022), 16–19 |
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2020 |
| 5. |
A. A. Sycheva, E. N. Voronina, “Features of low-energy He and Ar ion irradiation of nanoporous Si/SiO$_{2}$-based materials”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 46:11 (2020), 15–18 ; Tech. Phys. Lett., 46:6 (2020), 532–535 |
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