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Publications in Math-Net.Ru |
Citations |
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2010 |
| 1. |
V. M. Borisov, G. N. Borisova, A. Yu. Vinokhodov, S. V. Zakharov, A. S. Ivanov, Yu. B. Kiryukhin, V. A. Mishchenko, A. V. Prokof'ev, O. B. Khristoforov, “High-power EUV (13.5 nm) light source”, Kvantovaya Elektronika, 40:8 (2010), 720–726   [Quantum Electron., 40:8 (2010), 720–726   ] |
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2009 |
| 2. |
V. M. Borisov, A. Yu. Vinokhodov, A. S. Ivanov, Yu. B. Kiryukhin, V. A. Mishchenko, A. V. Prokof'ev, O. B. Khristoforov, “Laser-induced extreme UV radiation sources for manufacturing next-generation integrated circuits”, Kvantovaya Elektronika, 39:10 (2009), 967–972 [Quantum Electron., 39:10 (2009), 967–972 ] |
6
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2000 |
| 3. |
V. M. Borisov, A. Yu. Vinokhodov, V. A. Vodchits, A. V. El'tsov, A. S. Ivanov, “Development of high-power KrF lasers with a pulse repetition rate up to 5 kHz”, Kvantovaya Elektronika, 30:9 (2000), 783–786 [Quantum Electron., 30:9 (2000), 783–786 ] |
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