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Dunaev, Alexandr Valer'evich

Candidate of chemical sciences (2011)
   
Main publications:
  • 1. Vliyanie sostava smesi na elektrofizicheskie parametry i spektry izlucheniya plazmy $HCl–O_2$ i $HCl–Ar$ // TVT. 2011. T. 49. # 4. S. 509–512.
    2. Elektrofizicheskie parametry i emissionnye spektry plazmy tleyuschego razryada v khloristom vodorode // Izv. VUZov. Khimiya i khim. tekhnologiya. 2011. T. 54. Vyp. 9. S. 48 – 52.
    3. Electrophysical Parameters and Concentrations of Active Particles in the Plasma of $HCl$ Mixtures with Inert and Molecular Gases // Russian Microelectronics. 2014. Vol. 43. No. 5. pp. 352–357.
    4. Vliyanie temperatury na skorost travleniya i kachestvo poverkhnosti GaAs pri obrabotke v plazme $HCl-Ar$, $HCl-Cl_2$, $HCl-H_2$ // Izv. VUZov. Khimiya i khim. tekhnologiya. 2014. T. 57. #. 7. S. 50-55.
    5. Vzaimodeistvie plazmy smesei khlorovodorod - argon, - khlor, - vodorod s arsenidom galliya // Izv. VUZov. Khimiya i khim. tekhnologiya. 2014, T. 57, #. 8. Str. 44-47.
    6. Parametry plazmy i kinetika travleniya $GaAs$ v smesyakh $HCl+Ar$, $H_2$, i $Cl_2$ peremennogo nachalnogo sostava // Fizika i khimiya obrabotki materialov, 2015. # 6. S. 52–61.
    7. Issledovanie poverkhnosti $Ga As$ posle travleniya v plazme vysokochastotnogo i tleyuschego razryadov metodom atomno-silovoi mikroskopii // Fizika i tekhnika poluprovodnikov, 2016. T. 50 # 2. S. 167–170.
    8. Kinetika vzaimodeistviya vysokochastotnogo razryada $C Cl_2 F_2$ s arsenidom galliya // Mikroelektronika, 2016. T. 45. # 5. S. 374–378.)

https://www.mathnet.ru/eng/person97319
List of publications on Google Scholar
https://elibrary.ru/author_items.asp?authorid=628137

Publications in Math-Net.Ru Citations
2016
1. A. V. Dunaev, D. B. Murin, S. A. Pivovarenok, “Study of the surface of GaAs after etching in high-frequency and glow discharge plasma by atomic force microscopy”, Fizika i Tekhnika Poluprovodnikov, 50:2 (2016),  167–170  mathnet  elib; Semiconductors, 50:2 (2016), 167–170 6
2011
2. S. A. Pivovarenok, A. V. Dunaev, D. B. Murin, A. M. Efremov, V. I. Svettsov, “Effect of Mixture Composition on the Electrophysical Parameters and Emission Spectra of $\mathrm{HCl}$$\mathrm{O}_2$ and $\mathrm{HCl}$$\mathrm{Ar}$ Plasma”, TVT, 49:4 (2011),  509–512  mathnet  elib; High Temperature, 49:4 (2011), 491–494  isi  elib  scopus 14

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