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Fizika i Tekhnika Poluprovodnikov, 1985, Volume 19, Issue 1, Pages 33–37 (Mi phts1016)  
Laser and Thermal Annealing of Ultradisperse Implanted Germanium Layers

N. I. Akulovich, V. M. Maksimenko, E. I. Shtyrkov
Full-text PDF (831 kB)
Document Type: Article
Language: Russian
Citation: N. I. Akulovich, V. M. Maksimenko, E. I. Shtyrkov, “Laser and Thermal Annealing of Ultradisperse Implanted Germanium Layers”, Fizika i Tekhnika Poluprovodnikov, 19:1 (1985), 33–37
Citation in format AMSBIB
\Bibitem{1}
\by N.~I.~Akulovich, V.~M.~Maksimenko, E.~I.~Shtyrkov
\paper Laser and Thermal Annealing of Ultradisperse Implanted Germanium Layers
\jour Fizika i Tekhnika Poluprovodnikov
\yr 1985
\vol 19
\issue 1
\pages 33--37
\mathnet{http://mi.mathnet.ru/phts1016}
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  • https://www.mathnet.ru/eng/phts/v19/i1/p33
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