|
This article is cited in 1 scientific paper (total in 1 paper)
Carbon systems
Edge doping in graphene devices on SiO$_{2}$ substrates
G. Yu. Vasil'evaa, D. Smirnovb, Yu. B. Vasil'eva, A. A. Greshnova, R. J. Haugb a Ioffe Institute, St. Petersburg
b Institut fur Festkorperphysik, Leibniz Universitat Hannover, Hannover, Germany
Abstract:
The conductivity of single layer and bilayer graphene ribbons 0.5–4 $\mu$m in width fabricated by oxygen plasma etching is studied experimentally. The dependence of the electron concentration in graphene on the ribbon width is revealed. This effect is explained by the edge doping of graphene due to defects arranged in SiO$_{2}$ near the ribbon edges. The method of the formation of abrupt $p$–$n$ junctions in graphene and structures with a constant electron concentration gradient in the graphene plane with the help of edge doping is proposed.
Keywords:
graphene, edge doping, substrate, defects, plasma etching.
Received: 29.04.2019 Revised: 06.05.2019 Accepted: 06.05.2019
Citation:
G. Yu. Vasil'eva, D. Smirnov, Yu. B. Vasil'ev, A. A. Greshnov, R. J. Haug, “Edge doping in graphene devices on SiO$_{2}$ substrates”, Fizika i Tekhnika Poluprovodnikov, 53:12 (2019), 1681–1685; Semiconductors, 53:12 (2019), 1672–1676
Linking options:
https://www.mathnet.ru/eng/phts5335 https://www.mathnet.ru/eng/phts/v53/i12/p1681
|
|