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Fizika i Tekhnika Poluprovodnikov, 2016, Volume 50, Issue 1, Pages 83–88 (Mi phts6566)  
This article is cited in 9 scientific papers (total in 9 papers)

Semiconductor structures, low-dimensional systems, quantum phenomena

Assessment of the resistance to diffusion destruction of AlAs/GaAs nanoscale resonant-tunneling heterostructures by IR spectral ellipsometry

M. O. Makeev, Yu. A. Ivanov, S. A. Meshkov

Bauman Moscow State Technical University
Full-text PDF (703 kB) Citations (9)
URL: https://journals.ioffe.ru/ftp/2016/01/page-83.html.ru
Abstract: A technique for assessing the quality of AlAs/GaAs nanoscale resonant-tunneling heterostructures from the viewpoint of their resistance to diffusion destruction is developed. The diffusive spreading of AlAs/GaAs heterostructure layers is revealed by infrared (IR) spectral ellipsometry and the Al and Si diffusion coefficients in GaAs are determined.
Received: 17.03.2015
Accepted: 03.04.2015
English version:
Semiconductors, 2016, Volume 50, Issue 1, Pages 83–88
DOI: https://doi.org/10.1134/S1063782616010140
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: M. O. Makeev, Yu. A. Ivanov, S. A. Meshkov, “Assessment of the resistance to diffusion destruction of AlAs/GaAs nanoscale resonant-tunneling heterostructures by IR spectral ellipsometry”, Fizika i Tekhnika Poluprovodnikov, 50:1 (2016), 83–88; Semiconductors, 50:1 (2016), 83–88
Citation in format AMSBIB
\Bibitem{MakIvaMes16}
\by M.~O.~Makeev, Yu.~A.~Ivanov, S.~A.~Meshkov
\paper Assessment of the resistance to diffusion destruction of AlAs/GaAs nanoscale resonant-tunneling heterostructures by IR spectral ellipsometry
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2016
\vol 50
\issue 1
\pages 83--88
\mathnet{http://mi.mathnet.ru/phts6566}
\elib{https://elibrary.ru/item.asp?id=25668034}
\transl
\jour Semiconductors
\yr 2016
\vol 50
\issue 1
\pages 83--88
\crossref{https://doi.org/10.1134/S1063782616010140}
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  • https://www.mathnet.ru/eng/phts/v50/i1/p83
    • This publication is cited in the following 9 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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