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Fizika i Tekhnika Poluprovodnikov, 2023, Volume 57, Issue 5, Pages 343–347
DOI: https://doi.org/10.21883/FTP.2023.05.56201.28k (Mi phts6880) 		 
XXVII International Symposium "Nanophysics and Nanoelectronics", Nizhny Novgorod, 13 - 16 March 2023

Top-down formation of biocompatible SiC nanotubes

A. D. Bouravlevabcd, A. N. Kazakine, Yu. A. Nashchekinacf, A. V. Nashchekinc, E. V. Ubyivovkgch, V. A. Astrahancevaa, A. V. Osipovh, G. V. Svyatetsi, S. A. Kukushkinh

a Saint Petersburg Electrotechnical University "LETI", 197022 St. Petersburg, Russia
b AN HEO "University associated with IA EAEC", 194044 St. Petersburg, Russia
c Ioffe Institute, 194021 St. Petersburg, Russia
d Institute for Analytical Instrumentation, Russian Academy of Sciences, 198095 St. Petersburg, Russia
e Alferov Federal State Budgetary Institution of Higher Education and Science Saint Petersburg National Research Academic University of the Russian Academy of Sciences, 194021 St. Petersburg, Russia
f Institute of Cytology Russian Academy of Science, 194064 St. Petersburg, Russia
g Saint Petersburg State University, 198504 St. Petersburg, Russia
h Institute of Problems of Mechanical Engineering, Russian Academy of Sciences, 199178 St. Petersburg, Russia
i OOO Scientific and Technical Center "New Technologies", 195027 St. Petersburg, Russia
Full-text PDF (1760 kB)
DOI: https://doi.org/10.21883/FTP.2023.05.56201.28k
Abstract: It was found that the synthesis of silicon carbide epitaxial layers on silicon by coordinated substitution of atoms can be accompanied by the formation of silicon carbide nanotubes growing deep into silicon substrates. That is, for the first time discovered a new “top-down” mechanism for the formation of silicon carbide nanotubes.
Keywords: silicon carbide, nanotubes, vapor-liquid-crystal, nanostructure formation.
Funding agency Grant number
Ministry of Science and Higher Education of the Russian Federation FSEE-2022-0018
FFNF-2021-0001
The work of A.D. Buravlev and V.A. Astrakhantseva was supported by the Ministry of Education and Science of the Russian Federation (state assignment No. FSEE-2022-0018). S.A. Kukushkin and A.V. Osipov performed their part of the study within the state assignment of the Institute for Problems in Mechanical Engineering of the Russian Academy of Sciences FSUE No. FFNF-2021-0001 of the Ministry of Science and Higher Education of the Russian Federation.
Received: 05.05.2023
Revised: 29.06.2023
Accepted: 06.07.2023
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. D. Bouravlev, A. N. Kazakin, Yu. A. Nashchekina, A. V. Nashchekin, E. V. Ubyivovk, V. A. Astrahanceva, A. V. Osipov, G. V. Svyatets, S. A. Kukushkin, “Top-down formation of biocompatible SiC nanotubes”, Fizika i Tekhnika Poluprovodnikov, 57:5 (2023), 343–347
Citation in format AMSBIB
\Bibitem{BouKazNas23}
\by A.~D.~Bouravlev, A.~N.~Kazakin, Yu.~A.~Nashchekina, A.~V.~Nashchekin, E.~V.~Ubyivovk, V.~A.~Astrahanceva, A.~V.~Osipov, G.~V.~Svyatets, S.~A.~Kukushkin
\paper Top-down formation of biocompatible SiC nanotubes
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2023
\vol 57
\issue 5
\pages 343--347
\mathnet{http://mi.mathnet.ru/phts6880}
\crossref{https://doi.org/10.21883/FTP.2023.05.56201.28k}
\elib{https://elibrary.ru/item.asp?id=55811606}
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