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Fizika i Tekhnika Poluprovodnikov, 2023, Volume 57, Issue 8, Pages 613–616
DOI: https://doi.org/10.61011/FTP.2023.08.56953.4966C (Mi phts6930) 		 
International Physics Conference, St. Petersburg, October 23-27, 2023, St. Petersburg

Influence of etching modes on the morphology and composition of the surface of multilayer porous silicon

A. S. Len'shina, Ya. A. Peshkova, O. V. Chernousovab, K. A. Barkova, S. V. Kannykina

a Voronezh State University, 394018 Voronezh, Russia
b Voronezh State University of Engineering Technologies, 394000 Voronezh, Russia
Full-text PDF (388 kB)
DOI: https://doi.org/10.61011/FTP.2023.08.56953.4966C
Abstract: Based on X-ray reflectometry and ultrasoft X-ray spectroscopy data, the opportunity of controlling surface porosity using multi-stage electrochemical etching modes is presented. It is presented how, with an increase in the porosity index of the near-surface layer, the morphology changes and the degree of oxidation of multilayer porous silicon samples increases.
Keywords: porous silicon, X-ray reflectometry, porosity.
Funding agency Grant number
Russian Science Foundation 19-72-10007
The work has been funded by a grant of the Russian Science Foundation No. 19-72-10007.
Received: 03.05.2023
Revised: 07.07.2023
Accepted: 30.10.2023
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. S. Len'shin, Ya. A. Peshkov, O. V. Chernousova, K. A. Barkov, S. V. Kannykin, “Influence of etching modes on the morphology and composition of the surface of multilayer porous silicon”, Fizika i Tekhnika Poluprovodnikov, 57:8 (2023), 613–616
Citation in format AMSBIB
\Bibitem{LenPesChe23}
\by A.~S.~Len'shin, Ya.~A.~Peshkov, O.~V.~Chernousova, K.~A.~Barkov, S.~V.~Kannykin
\paper Influence of etching modes on the morphology and composition of the surface of multilayer porous silicon
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2023
\vol 57
\issue 8
\pages 613--616
\mathnet{http://mi.mathnet.ru/phts6930}
\elib{https://elibrary.ru/item.asp?id=64906763}
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