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This article is cited in 1 scientific paper (total in 1 paper)
Electronic properties of semiconductors
Effect of the presence of a sufficiently high phosphorus concentration on the concentration distribution of gallium in silicon
M. K. Bahadirkhanov, N. F. Zikrillaev, S. B. Isamov, Kh. S. Turekeev, S. A. Valiev Tashkent State Technical University, 100095 Tashkent, Uzbekistan
Abstract:
It was found that the silicon preliminarily doped with a high concentration of phosphorus during the diffusion of gallium, there is a significant increase in the solubility of the gallium. The results obtained are explained by the interaction of gallium and phosphorus atoms, as a result of which quasi-neutral molecules [P$^+$Ga$^-$] are formed. It is assumed that the formation of such quasineutral molecules [P$^+$Ga$^-$] stimulates the formation of Si$_2$GaP binary unit cells in the silicon lattice. It is shown that a sufficiently high concentration of such unit cells can lead to a significant change in the electrophysical parameters of silicon, i.e. the possibility of obtaining a new material based on silicon.
Keywords:
silicon, gallium, phosphorus, binary cell, diffusion.
Received: 09.04.2021 Revised: 11.09.2021 Accepted: 20.09.2021
Citation:
M. K. Bahadirkhanov, N. F. Zikrillaev, S. B. Isamov, Kh. S. Turekeev, S. A. Valiev, “Effect of the presence of a sufficiently high phosphorus concentration on the concentration distribution of gallium in silicon”, Fizika i Tekhnika Poluprovodnikov, 56:2 (2022), 199–203
Linking options:
https://www.mathnet.ru/eng/phts6996 https://www.mathnet.ru/eng/phts/v56/i2/p199
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