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Fizika i Tekhnika Poluprovodnikov, 2022, Volume 56, Issue 10, Pages 1011–1015
DOI: https://doi.org/10.21883/FTP.2022.10.53964.9961 (Mi phts7140) 		 
Manufacturing, processing, testing of materials and structures

Growth of hexagonal boron nitride (hBN) on silicon carbide substrates by the physical vapor transport method

E. N. Mokhov, V. Yu. Davydov, A. N. Smirnov, S. S. Nagalyuk

Ioffe Institute, 194021 St. Petersburg, Russia
Full-text PDF (267 kB)
DOI: https://doi.org/10.21883/FTP.2022.10.53964.9961
Abstract: The possibility of growing hexagonal boron nitride (hBN) of high structural perfection on hexagonal silicon carbide (SiC) substrates using the physical vapor transport method is demonstrated. The results obtained indicate that this method is promising for the formation of large-area high-quality hBN/SiC heterostructures in the course of one technological process, which have a high potential for device applications.
Keywords: hexagonal boron nitride, high-temperature sublimation from the gas phase, Raman spectroscopy, photoluminescence.
Funding agency Grant number
Ministry of Science and Higher Education of the Russian Federation 0040-2019-0016
0040-2019-0006
The work was carried out with the support of state assignments of the Ministry of Science and Higher Education of the Russian Federation to Ioffe Institute (0040-2019-0016) and (0040-2019-0006).
Received: 15.09.2022
Revised: 23.09.2022
Accepted: 26.09.2022
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: E. N. Mokhov, V. Yu. Davydov, A. N. Smirnov, S. S. Nagalyuk, “Growth of hexagonal boron nitride (hBN) on silicon carbide substrates by the physical vapor transport method”, Fizika i Tekhnika Poluprovodnikov, 56:10 (2022), 1011–1015
Citation in format AMSBIB
\Bibitem{MokDavSmi22}
\by E.~N.~Mokhov, V.~Yu.~Davydov, A.~N.~Smirnov, S.~S.~Nagalyuk
\paper Growth of hexagonal boron nitride (hBN) on silicon carbide substrates by the physical vapor transport method
\jour Fizika i Tekhnika Poluprovodnikov
\yr 2022
\vol 56
\issue 10
\pages 1011--1015
\mathnet{http://mi.mathnet.ru/phts7140}
\crossref{https://doi.org/10.21883/FTP.2022.10.53964.9961}
\elib{https://elibrary.ru/item.asp?id=49988312}
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