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Fizika i Tekhnika Poluprovodnikov, 2015, Volume 49, Issue 1, Pages 98–101
(Mi phts7191)
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This article is cited in 7 scientific papers (total in 7 papers)
XVIII Symposium "Nanophysics and Nanoelectronics", Nizhni Novgorod, March 10-14, 2014
Epitaxial growth of hexagonal silicon polytypes on sapphire
D. A. Pavlov, A. V. Pirogov, N. O. Krivulin, A. I. Bobrov Lobachevsky State University of Nizhny Novgorod
Abstract:
The formation of a single-crystal silicon polytype is observed in silicon-on-sapphire structures by high-resolution transmission electron microscopy. The appearance of inclusions with a structure different from that of diamond is attributed to the formation of strong-twinning regions and the aggregation of stacking faults, which form their own crystal structure in the crystal lattice of silicon. It is demonstrated that the given modification belongs to the $9R$ silicon polytype.
Received: 23.05.2014 Accepted: 15.06.2014
Citation:
D. A. Pavlov, A. V. Pirogov, N. O. Krivulin, A. I. Bobrov, “Epitaxial growth of hexagonal silicon polytypes on sapphire”, Fizika i Tekhnika Poluprovodnikov, 49:1 (2015), 98–101; Semiconductors, 49:1 (2015), 95–98
Linking options:
https://www.mathnet.ru/eng/phts7191 https://www.mathnet.ru/eng/phts/v49/i1/p98
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